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Dry vacuum pump
Unozawa dry vacuum pump developed for the first time in the world
The multi-stage roots dry vacuum pump that UNOZAWA has developed for the first time in the world has the outstanding feature of clean vacuum and power savings.
Because it uses no oil or water at gas contact areas, the product has various merits.
TRV and TRM series with strong durability against condensable gas for chemical processes.
For clean and high vacuum requirments, we propose KTS and TS series as optimum products based on our vast experience.
Dry vacuum pump
TRV Series
Vertical type dry vacuum pump for chemical processes
This is a general purpose dry vacuum pump developed as a vacuum pump with high durability for condensable gases.
It is suitable for industries such as the chemical, medical, food, metal and optical industries that use vacuum.
Features
- Strong for condensation
It can easily discharge and collect the suctioned mist and condensed liquid.
- Power-saving and high performance
It is a multiple roots type vacuum pump that is developed with power saving feature.
- Small installation area
The vertical structure allows the smallest installation area.
- Wide operating range
It can operate continuously with no restriction of suction pressure from atmospheric pressure to the ultimate pressure.
- Small heat dissipation
Water cooling feature has a structure to reduce heat dissipation to environment.
- Low vibration and low noise
The rotor is highly balanced and
the pump has discharge silencer.
- Supporting special environment motors.
You can designate motors such as increased safety Ex-proof type and flameproof type.
Application
- Vacuum distillation, purification, condensing
- Vacuum dehydration, dewatering
- Vacuum deairing, defoaming
- Vacuum cooling
- Vacuum suction conveyance
- Vacuum packaging machine
- Vacuum molding machine
- Solvent recovery
- Other vacuum machines that treat condensable gases
Caution
Contact us for the gas can be handled by this vacuum pump.
Particularly about corrosive gas, toxic gas, explosive and flammable gas and gases containing solvent and powder, please contact us.
Catalog
TRM Series
Dry vacuum pump for chemical processes
This is a general purpose dry vacuum pump that has long experiences and rich achievements.
It is suitable for industries such as the chemical, medical, food, metal and optical industries that use vacuum.
Features
- Wide operating range
It can operate continuously with no restriction of suction pressure from atmospheric pressure to the ultimate pressure.
- Power-saving and high performance
It is a multiple roots type vacuum pump that is developed with power saving feature.
- It can suction mist
It can discharge condensed liquid in the pump, enabling solvent recovery.
- Low vibration and low noise
The rotor is highly balanced and the pump has discharge silencer.
- Supporting special environment motors
You can designate motors such as increased safety Ex-proof type and flameproof type.
- Supporting special specifications
It can support special specifications such as stainless material.
- Water contamination free
Since the gas is cooled indirectly, it will not contaminate cooling water.
- Long continuous operation
Because the rotor rotates with no contact and has no friction parts, it can operate continuously for a long period.
Application
- Vacuum distillation, purification, condensing
- Vacuum dehydration, dewatering
- Vacuum deairing, defoaming
- Vacuum cooling
- Vacuum suction conveyance
- Vacuum packaging machine
- Vacuum molding machine
- Solvent recovery
- Other vacuum machines that treat condensable gases
Caution
Contact us for the gas can be handled by this vacuum pump.
Particularly about corrosive gas, toxic gas, explosive and flammable gas and gases containing solvent and powder, please contact us.
Catalog
KTS Series
Compact type air-cooled dry vacuum pump for clean processes
This is a lightweight compact type air-cooled dry vacuum pump. Owing to its roots type with excellent durability, it has a long maintenance cycle and can also Application.
Features
- Air-cooled type
It can be installed easily anywhere without cooling water.
- Lightweight and compact
We have achieved a lightweight and compact pump by using aluminum alloy as the main material.
- Low vibration and low noise
The rotor, a rotating body, is highly balanced, and a silencer is embedded to reduce the exhausting noise.
- Clean vacuum
Because it employs the multi-stage roots type vacuum feature with no sliding parts inside the pump, it can achieve clean vacuum with no reverse diffusion of oil or development of particles.
- Exhaust of water vapor
By the use of a flush air structure (purging by atmosphere), it can exhast water vapor without water retention inside the pump. It can be used for applications such as vacuum dehydration.
- Long maintenance cycle
Because there are no sliding parts inside the pump, it assures stable operation for a long period.
For this reason, the maintenance cycle is long, which allows a large reduction of maintenance costs.
- High degree of airtightness
Since there is no shaft exposed to the outside by employing a canned motor,a high level of airtightness is attained.
Application
- Analysis equipment, physics and chemistry apparatus
- Vacuum drying apparatus
- Vacuum deairing, defoaming
- Vacuum cooling
- Gas circulating and collecting apparatus
- Gas displacement
- Helium leak detector
- Electron beam processing machine
- Vacuum suction conveyance
- Vacuum packaging machine
- Plasma cleaning equipment
- Vacuum molding machine
- Deposition apparatus, sputtering equipment
- Uses for load-lock exhaust
- Rough and regenerative pumping of cryopumps
- Rough pumping for TMP and various vacuum pump
- Other clean vacuum apparatus
Caution
Use this vacuum pump only for clean vacuum pumping purposes.
Do not use it for pumping of gases such as corrosive gas, toxic gas, explosive and flammable gas, and gases containing solvent and powder.
For the gas can be handled, please contact us.
The operable ambient temperature for this vacuum pump is 5 to 40 degrees C.
Catalog
TS Series
Large pumping speed dry pump for clean processes
This is an “ECO Dry Vacuum Pump for Clean Processes” with low power consumption and excellent durability.
It is best suited to non-corrosive gas applications that require clean vacuum without reverse diffusion of oil, and high reliability.
Features
- Low power consumption
The use of a multi-stage roots structure has enabled a large reduction in power consumption.
- High durability
The multi-stage roots structure with a back-flow cooling system enables high durability.
- Clean vacuum
It prevents reverse diffusion of oil or dust generated inside the pump.
- Low noise and low vibration
The rotor is highly balanced and the pump has discharge silencer as a standard accessory.
- Small heat dissipation
Water cooling feature has a structure to reduce heat dissipation to environment.
- Leak-tight structure
The use of a canned motor has allowed a leak rate as low as E10 - 6Pa.m3/sec or less.
- Long maintenance cycle
Since there are no sliding parts in the gas contact area, continuous operation for a long period is enabled.
Application
- Vacuum deposition apparatus, sputtering equipment
- Uses for load-lock exhaust
- Plasma cleaning equipment
- Single crystal pulling apparatus
- Electron beam processing machine
- Gas circulating and collecting apparatus
- Gas displacement
- Vacuum molding machine
- Vacuum suction conveyance
- Vacuum packaging machine
- Vacuum deairing, defoaming
- Vacuum cooling
- Analysis equipment, physics and chemistry apparatus
- Rough and regenerative pumping of cryopumps
- Rough pumping for TMP and various vacuum pump
- Other clean vacuum apparatus
Caution
Use this vacuum pump only for clean vacuum pumping purposes.
Do not use it for pumping of gases such as corrosive gas, toxic gas, explosive and flammable gas, and gases containing solvent.
For the gas can be handled, please contact us.
Catalog
